High stability and high transmittance LED Sapphire Substrate
Product Description
Al2O3 single crystal (Sapphire, also known as white sapphire,
sapphire) has very good thermal properties, excellent electrical
and dielectric properties, and is resistant to chemical corrosion.
It is resistant to high temperatures, good thermal conductivity,
high hardness, infrared transmission, and chemical stability. Good
sex. Widely used in high-temperature infrared window materials,
III-V group nitrides and a variety of epitaxial film substrate
materials, in order to meet the growing demand for blue, violet,
and white light-emitting diodes (LED) and blue lasers (LD), we
specializes in the production of high-quality sapphire crystals and
epitaxially polished substrates, and will provide you with a large
number of high-quality and low-price single crystals and
substrates.
Technical Specification
| Front Side Surface | Mirror polished , EPI-Ready |
|
| Surface Roughness | Ra < 3Å |
| Back Side Roughness | Fine ground, Ra=1.0±0.2um |
| TTV | ≤ 5.0μm |
| BOW | 0～-5um |
| Warp | ≤ 10.0μm |
| Bubble & Color | None by visual inspection in intensive light |
| Ground Boundary | None by visual inspection in fluorescent light |
| Cleanliness | Free visible contamination |
Measurement method
The bending (BOW) refers to the distance between the center point
of the neutral plane of the free unclamped wafer and the reference
plane of the neutral plane. The median plane reference plane is a
plane determined by three equidistant points on the designated
diameter circle that is smaller than the nominal diameter of the
wafer.
When measuring the bending of the sapphire substrate, under the
non-adsorption state, the virtual plane calculated by the least
square method is used as the reference plane for measurement. The
BOW value is the sum of the absolute value of the workpiece center
measurement value (measurement surface) and the absolute value of
the measurement value with the largest absolute value, which is
different from the center value sign. The symbol is the symbol of
the center measurement value.
Regarding the BOW value standard, there are specific provisions in
the SEMI related standards. However, with the development of
sapphire substrate patterning (PSS), epitaxial manufacturers have
higher requirements for the curvature of sapphire substrates, and
the industry has reached a higher consensus on this index.
Silian Optoelectronic Technology is committed to the research and
development , manufacturing and sales of higher-quality sapphire
substrates. It has core equipment and realizes the core process of
combining equipment and materials. It has the ability to produce
high-quality sapphire substrates, and the BOW value of the produced
sapphire substrates is better than Industry level.
